Power Semconductor Laboratory

Atomically-thin atomic-layer-deposited InZnO transistors with BEOL compatibility

  • Journal:IEEE Device Research Conference
  • Note:D Zheng, J Zhang, A Charnas, Z Zhang, X Lyu, P Liao, Z Lin and P. D. Ye
  • Translation or Not:no
  • Date of Publication:2022-01-01