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BEOL-Compatible Atomic-Layer-Deposited In-rich InGaO TFTs with High Positive-Gate-Bias-Stress Stability

  • Journal:IEEE Semiconductor Interface Specialists Conference
  • Note:J Zhang, Z Zhang, D Zheng, A Charnas, Z Lin, and P. D. Ye
  • Translation or Not:no
  • Date of Publication:2022-01-01
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