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Fabrication of a polycrystalline SiGe- and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate

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Journal: Semiconductor Science and Technology
Note: G Lin, D Liang, Z Huang, C Yu, P Cui, J Zhang, J Wang, J Xu, S Chen, C Li, Y Zeng
Translation or Not: no
Date of Publication: 2020-01-01

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