Fabrication of a polycrystalline SiGe- and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate
- Impact Factor:2.048
- Journal:Semiconductor Science and Technology
- Note:G Lin, D Liang, Z Huang, C Yu, P Cui, J Zhang, J Wang, J Xu, S Chen, C Li, Y Zeng
- Translation or Not:no
- Date of Publication:2020-01-01