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Ultrathin-Body TiO2 Thin Film Transistors With Record On-Current Density, ON/OFF Current Ratio, and Subthreshold Swing via O2 Annealing

  • Impact Factor:4.615
  • Journal:IEEE Electron Device Letters
  • Note:.J Zhang, M. Sales, G Lin, P Cui, P Pepin, J Vohs, S McDonnell, Y Zeng
  • Translation or Not:no
  • Date of Publication:2019-01-01
Pre One:Fabrication of a polycrystalline SiGe- and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate

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