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Highly Gate-Bias-Stress Stable Atomic-Layer-Deposited InZnO TFTs with BEOL-Compatibility

Journal: IEEE Semiconductor Interface Specialists Conference
Note: .D Zheng, A Charnas, H Dou, Z Hu, J Zhang, H Wang, and P. D. Ye
Translation or Not: no
Date of Publication: 2022-01-01

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