Highly Gate-Bias-Stress Stable Atomic-Layer-Deposited InZnO TFTs with BEOL-Compatibility
- Journal:IEEE Semiconductor Interface Specialists Conference
- Note:.D Zheng, A Charnas, H Dou, Z Hu, J Zhang, H Wang, and P. D. Ye
- Translation or Not:no
- Date of Publication:2022-01-01