Power Semconductor Laboratory

Highly Gate-Bias-Stress Stable Atomic-Layer-Deposited InZnO TFTs with BEOL-Compatibility

  • Journal:IEEE Semiconductor Interface Specialists Conference
  • Note:.D Zheng, A Charnas, H Dou, Z Hu, J Zhang, H Wang, and P. D. Ye
  • Translation or Not:no
  • Date of Publication:2022-01-01