Power Semconductor Laboratory
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Low-Temperature CF4/N2O Plasma Treated In2O3 Thin Film Transistors with Excellent Bias Stability

  • Journal:IEEE Semiconductor Interface Specialists Conference
  • Note:J Zhang, A Charnas, Z Lin, D Zheng, Z Zhang, P Liao, and P. D. Ye
  • Translation or Not:no
  • Date of Publication:2022-01-01
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